Nanofabrication service

Scanning Electron Microscopy (SEM)

Environmental Scanning Electron Microscope

The Zeiss EVO LS25 is our general purpose scanning electron microscope (SEM) with a lanthanum hexaboride filament as the electron source and an accelerating voltage up to 30 kV. It has a specified edge resolution of 3 nm at 30 kV, 10 nm at 3 kV and 20 nm at 1 kV.

It has an integrated Oxford Instruments INCAx-act X-ray detector for energy dispersive X-ray analysis (EDX). The system also features an IFG iMOXS X-ray source that enables trace element identification via X-ray fluorescence spectroscopy (XRF). It also features a 'variable pressure' mode (also known as 'environmental' mode) to allow non-conductive samples to be imaged without the necessity to coat, in order to neutralise surface charging.

Field Emission Scanning Electron Microscope

The Field Emission Scanning Electron Microscope (FESEM) provides somewhat higher resolution imaging than the environmental SEM. The resolution is ≤ 1.4 nm at 1 kV acceleration voltage and ≤ 1.0 nm at 15 kV. The acceleration voltage is also between 0.1 kV – 30 kV. Low kV imaging modes available with sample bias (up to 3kV) allowing observation of insulating samples without charging.

We can run the SEM on different size of samples and wafers up to 150 mm wafer with the X-Y movement >140 mm, Z movement at 1.5 mm – 25 mm, tilt range -5° tp +60° and rotation at 360° Eucentric.